During this paper, the new lapping slurry and sharpening slurry are launched. Along with the deliquescence diploma of CLBO is fallen to most affordable. A completely new Doing work engineering is also adopted. Right after tough sprucing, the focus of extremely-precision sharpening slurry is greater thoroughly. So does the extremely-precision polishing velocity, and also the wiping speed is quicker than the deliquescence pace. The CLBO crystal floor roughness can reach 1nm and maintain the surface high quality effectively. Accessibility by means of your institution
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For instance, The existing concave OC could get replaced by a plane mirror which could mitigate the facility density over the floor of M1 as well as the diamond. Furthermore, applying significant injury threshold coatings for M1 and diamond would also Increase the output electrical power with none damages. Then, the NIR laser with the 2nd Stokes wavelength could possibly be high more than enough, and also its good beam high-quality, to produce the ultimate DUV laser at 193 nm having a superior common electric power.
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On one other aspect, the power scaling of the NIR laser is another aspect to enhance the regular electrical power of the 193-nm DUV laser. Mainly because of the deficiency of the higher-electricity amplification Alternative of your NIR laser (by way of example at 1553 nm), nonlinear frequency procedures for example optical parameter oscillation (OPO) can be applied to develop a wavelength converter by shifting the wavelength from one μm to the desired wavelength and obtaining relative better power [21]. Lately, a diamond Raman laser showed its means in attaining a significant energy and a significant conversion performance within the 1st Stokes in the 1-μm laser [22,23], which suggests the possibility for being utilized from the 193-nm DUV laser technology as a CLBO Crystal consequence of its significant Raman get and huge frequency shift.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics on the Nd:YAG elementary laser wavelength. So as to enrich the hurt threshold, lower CLBO surface area roughness, by ultra-precision machining, is needed. Since the CLBO crystal has effortless hydroscopic reaction and micro scratches in machining, extremely-precise machining of the CLBO crystal is usually a tricky technical dilemma.
Tunable ultraviolet laser resource dependant on solid-point out dye laser technology and CsLiB6O10 harmonic technology
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